・ 무정지 연속 동작에 의한 고속 도포
・ 무정지 연속 동작에 의한 고속 얼라인먼트:
Mu SKY Capture 기능
・ 도포량 관리 자동화: DVM 기능
・ 보이드 회피에 이상적인 도포 패턴 '리프 라인' 형성: MCD 기능[PAT.P]
・ 대량 불량 사전 방지: AFC 기능
・웨이퍼 매핑 기능 탑재
・EFEM과 연결한 전자동 생산 가능
・웨이퍼, FOUP 대응
・웨이퍼 매핑 기능
・결과 리매핑(SECSGEM 대응) ※옵션

EFEM(Equipment Front End Module)이란

EFEM은 웨이퍼의 로드 및 언로드를 수행하는 모듈 장비로, 웨이퍼를 수납하는 풉(FOUP: Front Opening Unified Pod)이나 웨이퍼 카세트라고 불리는 용기에서 클린룸 기준을 유지하면서 자동으로 웨이퍼를 꺼내 공정 장비로 이송하는 역할을 담당합니다.

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SPECIFICATION개략 사양

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명칭

전자동 웨이퍼 레벨 디스펜스 머신 FAD5100S-WH

형식

FAD5100S-WH

제어 방식

PC/PLC 제어(SMEMA 준수)

적용 워크

12인치 웨이퍼, 8인치 웨이퍼

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제품 검색

카테고리별 검색

@charset "UTF-8";/*! normalize.css v3.0.2 | MIT License | git.io/normalize */*, *::before, *::after {-webkit-box-sizing: border-box;box-sizing: border-box;}.inner{max-width: 1120px;margin: auto;width: 94%;}table{width: 100%;table-layout: fixed;border-collapse: collapse}th,td{padding: 1rem;border: 1px solid #ccc;}td{vertical-align: top;}ul,ol{padding-left: 20px;}li+li{margin-top: .5rem;}dt{font-weight: bold;}dd{margin-left: 0;margin-top: .5rem;}dd+dt{margin-top: 1rem;}img{max-width: 100%;height: auto}a {text-decoration: none;background-color: transparent;}a:hover {text-decoration: underline;}input,select,textarea{border: 1px solid #ccc;padding: .25rem .5rem;}input, button, select, optgroup, textarea {margin: 0;font-family: inherit;font-size: inherit;line-height: inherit;outline: none;}label {cursor: pointer;display: block;margin-bottom: .25rem;margin-right: 1rem;}input[type='text']{appearance: none;-webkit-appearance: none;-moz-appearance: none;width: 100%;}input[type='checkbox'],input[type='radio']{margin-right: .5rem;}input[type='submit']{border: none;display: block;margin: auto;padding: .75rem 5rem;cursor: pointer;}.bmh_btn a{border-radius: 100vh;background-color: #999;padding: .75rem;color: #fff;text-decoration: none;display: inline-block;}.bmh_btn a span{position: relative;padding-right: 2rem;padding-left: 1.5rem;display: inline-block;}.bmh_btn a span::after{content: "";margin: auto;right: .5rem;position: absolute;top: 0;bottom: 0;width: 6px;height: 6px;border-top: 2px solid #fff;border-right: 2px solid #fff;transform: rotate(45deg);}.bmh_btn a:hover{background-color: #777;text-decoration:none;}.bmh_link a{padding-left: 1rem;position: relative;color: #333;display: inline-block;}.bmh_link a::before{content: "";margin: auto;left: 0;position: absolute;top: calc(.5rem + 1px);width: 4px;height: 4px;border-top: 2px solid #333;border-right: 2px solid #333;transform: rotate(45deg);}div[id^="listgrid2col"]>div,div[id^="listgrid3col"]>div,div[id^="listgrid4col"]>div,form[id^="formgrid"] {display: flex;flex-wrap: wrap;}div[id^="listgrid2col"]>div>div,div[id^="listgrid3col"]>div>div,div[id^="listgrid4col"]>div>div,div[id^="formgrid2col"]>form>div,div[id^="formgrid3col"]>form>div,div[id^="formgrid4col"]>form>div{width: 100%;}div[id^="listgrid2col"]>div>div:nth-child(n+2),div[id^="listgrid3col"]>div>div:nth-child(n+2),div[id^="listgrid4col"]>div>div:nth-child(n+2),div[id^="formgrid2col"]>form>div:nth-child(n+2),div[id^="formgrid3col"]>form>div:nth-child(n+2),div[id^="formgrid4col"]>form>div:nth-child(n+2){margin-top: 30px;}.bmh_calendar img,.bmh_calendar img{max-width: 90px;margin-left: .5rem;}.bmh_calendar span,.bmh_calendar>span,.bmh_calendar>span{display: flex;align-items: flex-end;flex-wrap: wrap;}.bmh_calendar>span>input,.bmh_calendar>span>input,.bmh_calendar>span>input{width: 9rem;}.bmh_calendar>span>img:last-child{margin-top: .5rem;}@media (min-width: 576px) {label {display: inline-block;}}@media (min-width: 768px) {div[id^="listgrid4col"]>div>div,div[id^="formgrid4col"]>form>div{width: calc(50% - 15px);margin-right: 30px;}div[id^="listgrid4col"]>div>div:nth-child(2n),div[id^="formgrid4col"]>form>div:nth-child(2n){margin-right: 0;}div[id^="listgrid4col"]>div>div:nth-child(n+2),div[id^="formgrid4col"]>form>div:nth-child(n+2){margin-top: 0;}div[id^="listgrid4col"]>div>div:nth-child(n+3),div[id^="formgrid4col"]>form>div:nth-child(n+3){margin-top: 30px;}div[id^="listgrid3col"]>div>div,div[id^="formgrid3col"]>form>div{width: calc(50% - 15px);margin-right: 30px;}div[id^="listgrid3col"]>div>div:nth-child(2n),div[id^="formgrid3col"]>form>div:nth-child(2n){margin-right: 0;}div[id^="listgrid3col"]>div>div:nth-child(n+2),div[id^="formgrid3col"]>form>div:nth-child(n+2){margin-top: 0;}div[id^="listgrid3col"]>div>div:nth-child(n+3),div[id^="formgrid3col"]>form>div:nth-child(n+3){margin-top: 30px;}div[id^="listgrid2col"]>div>div,div[id^="formgrid2col"]>form>div{width: calc(50% - 15px);margin-right: 30px;}div[id^="listgrid2col"]>div>div:nth-child(2n),div[id^="formgrid2col"]>form>div:nth-child(2n){margin-right: 0;}div[id^="listgrid2col"]>div>div:nth-child(n+2),div[id^="formgrid2col"]>form>div:nth-child(n+2){margin-top: 0;}div[id^="listgrid2col"]>div>div:nth-child(n+3),div[id^="formgrid2col"]>form>div:nth-child(n+3){margin-top: 30px;}}@media (min-width: 992px) {div[id^="listgrid4col"]>div>div,div[id^="formgrid4col"]>form>div{width: calc(25% - 18px);margin-right: 24px;}div[id^="listgrid4col"]>div>div:nth-child(n+2),div[id^="formgrid4col"]>form>div:nth-child(n+2){margin-right: 24px;}div[id^="listgrid4col"]>div>div:nth-child(4n),div[id^="formgrid4col"]>form>div:nth-child(4n){margin-right: 0;}div[id^="listgrid4col"]>div>div:nth-child(n+3),div[id^="formgrid4col"]>form>div:nth-child(n+3){margin-top: 0;}div[id^="listgrid3col"]>div>div,div[id^="formgrid3col"]>form>div{width: calc(33.333% - 20px);margin-right: 30px;}div[id^="listgrid3col"]>div>div:nth-child(2n),div[id^="formgrid3col"]>form>div:nth-child(2n){margin-right: 30px;}div[id^="listgrid3col"]>div>div:nth-child(3n),div[id^="formgrid3col"]>form>div:nth-child(3n){margin-right: 0;}div[id^="listgrid3col"]>div>div:nth-child(3),div[id^="formgrid3col"]>form>div:nth-child(3){margin-top: 0;}div[id^="listgrid3col"]>div>div:nth-child(n+4),div[id^="formgrid3col"]>form>div:nth-child(n+4){margin-top: 30px;}}

시장별 검색

디지털 정보 단말기·정보 통신

가전·사무기기

자동차·차량용 부품·모빌리티

반도체·실장·전자 부품

주택·플랜트·에너지

의료·바이오·화장품

식품

기타

애플리케이션으로 찾기

조립·고정(접착)

도통

방열

윤활

보호(코팅)

봉지(충전)

보강

실

언더필

차광

가식

혼합·합성

첨가

분주

성형

도장

기타

도포 형상으로 찾기

점도포

선긋기

면 도장

충전

* , *::before, *::after {-webkit-box-sizing: border-box;box-sizing: border-box;} .inner{max-width: 1120px;margin: auto;width: 94%;} table{width: 100%;table-layout: fixed;border-collapse: collapse} th,td{padding: 1rem;border: 1px solid #ccc;} td{vertical-align: top;} ul,ol{padding-left: 20px;} li+li{margin-top: .5rem;} dt{font-weight: bold;} dd{margin-left: 0;margin-top: .5rem;} dd+dt{margin-top: 1rem;} img{max-width: 100%;height: auto} a {text-decoration: none;background-color: transparent;} a:hover {text-decoration: underline;} input,select,textarea{border: 1px solid #ccc;padding: .25rem .5rem;} input, button, select, optgroup, textarea {margin: 0;font-family: inherit;font-size: inherit;line-height: inherit;outline: none;} label {cursor: pointer;display: block;margin-bottom: .25rem;margin-right: 1rem;} input[type='text']{appearance: none;-webkit-appearance: none;-moz-appearance: none;width: 100%;} input[type='checkbox'],input[type='radio']{margin-right: .5rem;} input[type='submit']{border: none;display: block;margin: auto;padding: .75rem 5rem;cursor: pointer;} .bmh_btn a{border-radius: 100vh;background-color: #999;padding: .75rem;color: #fff;text-decoration: none;display: inline-block;} .bmh_btn a span{position: relative;padding-right: 2rem;padding-left: 1.5rem;display: inline-block;} .bmh_btn a span::after{content: "";margin: auto;right: .5rem;position: absolute;top: 0;bottom: 0;width: 6px;height: 6px;border-top: 2px solid #fff;border-right: 2px solid #fff;transform: rotate(45deg);} .bmh_btn a:hover{background-color: #777;text-decoration:none;} .bmh_link a{padding-left: 1rem;position: relative;color: #333;display: inline-block;} .bmh_link a::before{content: "";margin: auto;left: 0;position: absolute;top: calc(.5rem + 1px);width: 4px;height: 4px;border-top: 2px solid #333;border-right: 2px solid #333;transform: rotate(45deg);} div[id^="listgrid2col"]>div,div[id^="listgrid3col"]>div,div[id^="listgrid4col"]>div,form[id^="formgrid1col"],form[id^="formgrid3col"],form[id^="formgrid4col"]{display: flex;flex-wrap: wrap;} div[id^="listgrid2col"]>div>div,div[id^="listgrid3col"]>div>div,div[id^="listgrid4col"]>div>div, div[id^="formgrid2col"]>form>div,div[id^="formgrid3col"]>form>div,div[id^="formgrid4col"]>form>div{width: 100%;} div[id^="listgrid2col"]>div>div:nth-child(n+2),div[id^="listgrid3col"]>div>div:nth-child(n+2),div[id^="listgrid4col"]>div>div:nth-child(n+2), div[id^="formgrid2col"]>form>div:nth-child(n+2),div[id^="formgrid3col"]>form>div:nth-child(n+2),div[id^="formgrid4col"]>form>div:nth-child(n+2){margin-top: 30px;} .bmh_calendar img,.bmh_calendar img{max-width: 90px;margin-left: .5rem;} .bmh_calendar span,.bmh_calendar>span,.bmh_calendar>span{display: flex;align-items: flex-end;flex-wrap: wrap;} .bmh_calendar>span>input,.bmh_calendar>span>input,.bmh_calendar>span>input{width: 9rem;} .bmh_calendar>span>img:last-child{margin-top: .5rem;} @media (min-width: 576px) { label {display: inline-block;} } @media (min-width: 768px) { div[id^="listgrid4col"]>div>div,div[id^="formgrid4col"]>form>div{width: calc(50% - 15px);margin-right: 30px;} div[id^="listgrid4col"]>div>div:nth-child(2n),div[id^="formgrid4col"]>form>div:nth-child(2n){margin-right: 0;} div[id^="listgrid4col"]>div>div:nth-child(n+2),div[id^="formgrid4col"]>form>div:nth-child(n+2){margin-top: 0;} div[id^="listgrid4col"]>div>div:nth-child(n+3),div[id^="formgrid4col"]>form>div:nth-child(n+3){margin-top: 30px;} div[id^="listgrid3col"]>div>div,div[id^="formgrid3col"]>form>div{width: calc(50% - 15px);margin-right: 30px;} div[id^="listgrid3col"]>div>div:nth-child(2n),div[id^="formgrid3col"]>form>div:nth-child(2n){margin-right: 0;} div[id^="listgrid3col"]>div>div:nth-child(n+2),div[id^="formgrid3col"]>form>div:nth-child(n+2){margin-top: 0;} div[id^="listgrid3col"]>div>div:nth-child(n+3),div[id^="formgrid3col"]>form>div:nth-child(n+3){margin-top: 30px;} div[id^="listgrid2col"]>div>div,div[id^="formgrid2col"]>form>div{width: calc(50% - 15px);margin-right: 30px;} div[id^="listgrid2col"]>div>div:nth-child(2n),div[id^="formgrid2col"]>form>div:nth-child(2n){margin-right: 0;} div[id^="listgrid2col"]>div>div:nth-child(n+2),div[id^="formgrid2col"]>form>div:nth-child(n+2){margin-top: 0;} div[id^="listgrid2col"]>div>div:nth-child(n+3),div[id^="formgrid2col"]>form>div:nth-child(n+3){margin-top: 30px;} } @media (min-width: 992px) { div[id^="listgrid4col"]>div>div,div[id^="formgrid4col"]>form>div{width: calc(25% - 18px);margin-right: 24px;} div[id^="listgrid4col"]>div>div:nth-child(n+2),div[id^="formgrid4col"]>form>div:nth-child(n+2){margin-right: 24px;} div[id^="listgrid4col"]>div>div:nth-child(4n),div[id^="formgrid4col"]>form>div:nth-child(4n){margin-right: 0;} div[id^="listgrid4col"]>div>div:nth-child(n+3),div[id^="formgrid4col"]>form>div:nth-child(n+3){margin-top: 0;} div[id^="listgrid3col"]>div>div,div[id^="formgrid3col"]>form>div{width: calc(33.333% - 20px);margin-right: 30px;} div[id^="listgrid3col"]>div>div:nth-child(2n),div[id^="formgrid3col"]>form>div:nth-child(2n){margin-right: 30px;} div[id^="listgrid3col"]>div>div:nth-child(3n),div[id^="formgrid3col"]>form>div:nth-child(3n){margin-right: 0;} div[id^="listgrid3col"]>div>div:nth-child(3),div[id^="formgrid3col"]>form>div:nth-child(3){margin-top: 0;} div[id^="listgrid3col"]>div>div:nth-child(n+4),div[id^="formgrid3col"]>form>div:nth-child(n+4){margin-top: 30px;} }